| Fuilds | 1L, 5L, 10L, 30L, 50L/MIN (AT20°C) | |
| Flow Range (Full scale) | Use for Air, N2 and O2 exclusively | |
| Accuracy | FS ±7% | |
| Available Scale | 10:1 | |
| Proof Pressure | 0.5MPa | |
| Material | SS: SUS316, Prey, FKM, SUS304, SUS303, glass SB: Brass, Pyrex, NBR, SUS303, glass |
|
| Temperature Resistance | 60°C (MAX) | |
| Connection | Rc 1/4 | |
