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High-Grade Mass Flow Meter

Model 3100 Seires

The Model 3100 Series Mass Flow Meter is a new, advanced high-precision flowmeter develope based on the Model 3200 Series. the incorporated innovative capilary type flow sensor reduces pressure loss and ensures high reponse as well as ensuring stability

Features

  • Equipped with a temperature follow-up type current difference detection flow sensor to ensure high accuracy and quick response
  • Measurement of minute flows available up to 1 SCCM full scale (SR option)

Standard Specifications

Hardness Layout

Pin Assignment of Dsub 9-pin Connector per KFC Standard

Pin no Signal
1 NC
2 Flow output 0-5V
3 +15VDC Power source
4 Power source COM
5 -15 VDC Power source
6 NC
7 Flow output COM
8 NC
9 NC

Dimension

Plants: image 1
ORDERING

Plants: image 1
* Refer to "Ordering" and "Illustative example" when placing an order or requesting a quotation. Fill in the blanks in the "Order/Quotation Request Card" at the end of he catalog, and send the card by fax.
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